The AP Batch Series is engineered for high-performance plasma treatment in both batch manufacturing and R&D environments, delivering consistent, repeatable results across a wide range of applications.

The AP-600 and AP-1000 plasma systems are designed for plasma cleaning, surface activation, and adhesion enhancement processes. Built for industries where precision and reliability matter most, these systems provide highly uniform plasma treatment for semiconductor fabrication, microelectronics packaging and assembly, and medical device manufacturing.

Whether you’re scaling from development to full production or optimizing an existing process, the AP Batch Series ensures seamless process transfer, controller consistency, and dependable vacuum plasma performance.

With streamlined configurations and short lead times, these systems deliver the essential capabilities manufacturers need to move quickly and confidently.

Flexible Batch Processing

Compact yet highly adaptable, the AP Batch Series features configurable shelf architecture to accommodate a variety of part carriers and production requirements. Systems support both direct and downstream plasma processing modes, making them ideal for diverse applications and evolving production demands.

Key Features of the AP Batch Series

• Compact system platform with a 13.56 MHz RF generator and automatic impedance matching for exceptional process stability and repeatability
• Compatible with a wide range of process gases, including argon, oxygen, nitrogen, helium, and fluorinated gases
• User-friendly touchscreen interface with real-time monitoring and production data access for statistical process control
• Two standard electronic mass flow controllers with the option to add a third controller for expanded gas management
• Adjustable and removable powered or grounded shelving designed to support multiple carrier formats, including magazines, trays, and Auer® boats
• Rugged, high-quality construction engineered for long-term reliability in demanding manufacturing environments

The AP Batch Series combines process flexibility, production-ready performance, and proven plasma technology in a compact, scalable platform. From R&D labs to high-volume manufacturing, these systems are designed to support consistent outcomes, faster process development, and reliable operation across critical applications.